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  • 首頁
  • HOME
  • 產品項目
    • 壓電平台 >
      • 電感式系列
      • 光學式系列
    • 原子力顯微鏡 >
      • Crabi-AFM (研究用)
    • 馬達平台(敬請期待)
  • Product list
    • Piezo stage >
      • Inductive sensor series
      • Optical sensor series
    • Atomic Force Microscope >
      • Crabi-AFM (Research)
    • Motor stage(Stay tuned)
  • Technology blog
  • 關於
  • About
  • 聯絡我們
  • Contact
  • 檔案下載
  • Download
  • 線上商店
  • e STORE
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Inductive sensor series

The inductive sensing element is applied as the core for position feedback. This product series provides not only the practical positioning resolution but also the more compact size, the better tolerance for the environment and the competitive price. It is highly adaptable to any application requiring high-precision positioning, micro-nano motion control as well as in the vacuum environment.
Optical series
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Linear stage
​The inductive piezo linear stage offers 4 kinds of travel range which are 20, 28, 36, and 44 mm. The maximum loading is up to 4 kg with 37 nm typical resolution.​

standard series
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Vertical stage
​The inductive piezo vertical stage offers 1 kind of travel range which is 10 mm. The maximum loading is 150 g with 37 nm typical resolution.
standard series
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Compact XY stage
(Stay tuned)
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standard series

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Piezo controller
The inductive piezo controller, which is only compatible with the inductive piezo stage, provides the axis quantity from 1 to 3. The D-sub (DB9) connectors are applied for signal communication and control.​
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